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Vacuum valves
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Vacuum Butterfly Valves
- Htc APC butterfly valve
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- 3-Position butterfly valve
- High vacuum butterfly valve
- Low vacuum Butterfly Valve
- BV-D Series Butterfly Valve
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Vacuum Pump
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EBARA Dry Pump Repair kits
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Vacuum Butterfly Valves
※ Please select product classify ※
Htc APC butterfly valve
CF butterfly valve APC control system
KF butterfly valve APC control system
ISO butterfly valve APC control system
APC butterfly valve brief introduction
APC butterfly valve gate system settings
1. Valve
2. Process chamber
3. Gas inlet
4. Pressure sensor(s)
5. Sensor cable(s)
6. Controller and actuator
7. Cable to remote control unit
8. Cable to power supply
9. Pump
APC butterfly valve features
- Integrated pressure controller
- Accurate pressure control
- Compact isolation
- Short response time
- Friendly user interface
Main applications
Downstream pressure control and isolation valve.Applications process
>> SEMI - Semiconductor
>> FPD - Flat Panel Display
>> PVD - Physical Vapor Deposition
>> Solar
Butterfly valve control system - APC controller
Features
>> Sensor supply : 24V DC or ±15V DC
>> Backup power : Yes
>> Sensor input
---->> Q'ty of sensors : 2
---->> Signal voltage : 0-10V DC linear with pressure
---->> Inupt resistance : Ri=47 kΩ
---->> Resolution : 2.3 mV
---->> Sample rate : 1ms
>> Control accuracy : 0.2% of maximum sensor range
>> Position resolution : 8000(step 0-90o rotation)
APC software functions
FControl via computer by using the APC software offers convenient functions
- Pressure and position control mode
- Schedule test Mode=> 1 cycle schedule
- Set valve open/close speed
- Report APC HW/SW version, serial and model number
- Report valve cycles and run hours
- Set tolerance scope of pressure
- Cycles life and pressure control record
- Controller parameter upload and download
- Power failure protection
- Screen cappture
- Pressure learning function
Vacuum butterfly valve is a valve which can be used for isolating or regulating flow. The closing mechanism takes the form of a disk. Operation is similar to that of a ball valve, which allows for quick shut off. Butterfly valves are generally favored because they are lighter in weight, meaning less support is required.
Htc vacuum provides various butterfly valves which features long service life, high quality and high performance, the robust and rugged design can be relied upon for years of trouble free service. There are manual, pneumatic and electric actuators butterfly valve available for different applications. One thing should be aware is that when the butterfly valve is fully open and the disk is protrusive from the valve body, the disk might interfere the inner surface of the connecting duct, users should check the minimum ID of connecting duct before installation.
