Vacuum Butterfly Valves
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Htc Pneumatic Butterfly Valve
ISO-KF TYPE pneumatic butterfly valve
ISO-F TYPE air actuated butterfly valve
ISO-K TYPE pneumatic butterfly valve
Pneumatic butterfly valve-gate system settings
B : Htc pneumatic butterfly valve
C : Process chamber
D : Gauge
E : Gas inlet
Htc Pneumatic butterfly valve is driven by rotating cylinder valve. The seal plate compacts O-ring isolated from the vacuum and atmosphere completely. Htc Pneumatic butterfly valve has advantages as quick opening and closing, easy installation, small size and long life cycles. Main application of Htc Pneumatic butterfly valve will be fully isolated contaminating and aggressive gas in processes. And the valve is located between pump and process chamber.
>> FPD - Flat Panel Display
>> SEMI - Semiconductor
>> PVD - Physical Vapor Deposition
Design principle / features
♦ Fast closing and opening time.
♦ Isolate vacuum and atmosphere.
♦ Position indicator.
♦ Any mounting position.
♦ Extremely cycle life.
♦ High conductance.
♦ KF25 / KF40 / KF50
♦ ISO63 / ISO100 / ISO160 / ISO200 / ISO250
Body / P late / Shaft Material
Vacuum butterfly valve is a valve which can be used for isolating or regulating flow. The closing mechanism takes the form of a disk. Operation is similar to that of a ball valve, which allows for quick shut off. Butterfly valves are generally favored because they are lighter in weight, meaning less support is required.
Htc vacuum provides various butterfly valves which features long service life, high quality and high performance, the robust and rugged design can be relied upon for years of trouble free service. There are manual, pneumatic and electric actuators butterfly valve available for different applications. One thing should be aware is that when the butterfly valve is fully open and the disk is protrusive from the valve body, the disk might interfere the inner surface of the connecting duct, users should check the minimum ID of connecting duct before installation.