Pendulum valve
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3 Position pendulum valve

3 Position Pendulum Valve (Double Acting)

Hard anodized 3 Position Pendulum Valve (Double Acting)

3 Position Pendulum Valve (Normal Close)
3-position pendulum valve attached reed sensor offers much better pressure control
Htc vacuum 3-Position pendulum valves achieve vacuum isolation and vacuum pressure control via an adjustable air cylinder. The pendulum valves attached reed sensor, let the controller and valve to go open, closed or to the third position, provide control better set point accuracy and repeatability.Htc vacuum pendulum pressure control system with high-performance, closed-loop motor control throttling pendulum valves, controllers and pressure gauges. It improve the pressure control performance and replace of the traditional gate valves at a reduced cost.
The less friction ,the less particle.

Material |
Body |
A6061-T6 |
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Gate |
A6061-T6 |
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Life Cycle |
200,000 cycles |
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Helium leak rates at 1 atm differential |
Body Aluminum |
<1×10-9 mbar .l /sec |
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Body Aluminum ,hard anodized |
<1×10-5 mbar .l /sec |
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Bake Temperature |
Body |
≤ 120 ℃ |
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Actuator |
≤ 80 ℃ |
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Solenoid valve |
≤ 50 ℃ |
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Pressure Range |
Aluminum |
1×10-8 mbar to 1.2 bar |
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Aluminum ,hard anodized |
1×10-6 mbar to 1.2 bar |
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Maximum ΔP |
1.2 bar |
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Max. ΔP during opening |
≤ 5 mbar |
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Compressed air pressure |
4 ~ 6 Kg/cm² |
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Opening / Closing time |
ISO 200 |
ISO 250 |
ISO 320 |
|
1.2/1.2 |
1.2/1.2 |
2.0/2.0 |
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Standard Seal |
Gate |
Viton O-ring |
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Bonnet |
Viton O-ring |
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Actuator |
Electro-Pneumatic and Manual |
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Weight |
ISO 200 |
ISO 250 |
ISO 320 |
|
22Kg |
32Kg |
52Kg |
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Mounting position |
Horizontal or Vertical |
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Options |
a. Other material of Gate O-ring |
Control Wiring Extern

Pin |
Function |
Status |
|
1 |
Power supply 24VDC |
P |
|
2 |
Power GROUND |
P |
|
3 |
Open signal input |
I |
|
4 |
Close signal input |
I |
|
5 |
Three-segment signal input |
I |
|
6 |
Reserved |
x |
|
7 |
Open signal output |
O |
|
8 |
Close signal output |
O |
|
9 |
Power supply 24VDC |
P |
|
10 |
Power GROUND |
P |
|
11 |
Three-segmentA signal output |
O |
|
12 |
Three-segmentB signal output |
O |
|
13 |
Reserved |
x |
|
14 |
Reserved |
x |
The pendulum valve used in the CVD process, etching process, and for chemical technology application it can be great safety too. This valve’s body in size is smaller, the space utilization is better, it has less vibration for the process when it is operating, also it is corrosion-resistant. We also have two kinds of surface treatment: the Nickel plating and the Anode hard coating. During it is processing there’s less visibility of dust, and it is easy to disassemble the equipment for maintenance, and no need to dismantle the entire equipment.