Edwards Turbomolecular Pumps
Htc vacuum is the exclusive agency and service center for Edwards Turbomolecular Pumps in Taiwan.All technology and overhaul process are transfered by Edwards.
Product Case
STP Pump with integrated controller

- Compact design including a fully integrated controller
- Innovative, self-sensing magnetic bearing system
- Digital 5-axis control
- Vibration levels reduced by 50% compared to the existing turbo pumps
- Can be configured to run corrosive processes
STP Pumps with Integrated Controller
STP Pump with Integrated Controller Application:
Flat Panel Display
Our extensive range of STP Maglev Turbomolecular Pumps are designed to maximise substrate throughput and ultimate zero humidity process condition, while minimising power, footprint and weight.
LED
Our latest range of STP Maglev Turbomolecular Pumps are the “all-in-one” compact solution with low power for large volume, high-flow applications.
Photovoltaic
Our STP Maglev Turbomolecular Pumps are optimised to meet customer specific applications, with exceptional process gas handling, consistent performance and maximum reliability.
Semiconductor Processing
The fully magnetically-levitated rotor has been designed to reduce the risk of contamination to the chamber and extend service intervals, making the STP Maglev Turbomolecular Pumps the reliable choice for your process tool.
Any Edwards Turbomolecular Pumps request, please contact us.
Tainan Technology Service Center |
Hsinchu Technology Service Center |
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