Synchrotron Radiation Chambers
製品の内訳
日本のシンクロトロン放射UHV室

Material:S.S.304
Surface treatment: Electro-polished
Spec.:CF 350 Flange rectangle UHV chamber
Leak rate<2 x 10-10mbar.l/sec
Operation Pressure<7.5 x10-10 torr
When the total pressure is below 1 x10-9 torr, partial pressure of above 45amu is <0.1%.