Custom Ultra-high vacuum chambers
製品の内訳
Custom-designed vacuum chamber
Customized UHV chamber of virtually any complexity
Material：S.S.304
Surface treatment：Electrolytic polishing
Spec.：CF Ultra-high vacuum chamber
Leak rate<2 x 10-10mbar.l/sec
Pressure<5 x10-10 torr
Flange concentricity aligned < 0.2ﾟ
