Custom Ultra-high vacuum chambers
製品の内訳
UHV square chambers
CF100, CF200 Rectangle customized UHV chamber
Material：S.S.304
Surface: Electro-polished
Spec: CF200 cylinder UHV chamber
Leakage rate: 2 x 10-10mbar.l/sec
Operation pressure<7.5 x10-10 torr
When the total pressure is below 1 x10-9 torr, partial pressure of above 45amu is <0.1%.
